说明
KrF Scanner配置
无配置OEM 型号描述
The FPA-5000ES3 is a KrF scanner with a 0.73 NA, designed for 130nm production. It is built on the Canon FPA-5000 scanning platform and incorporates experience from previous models. The ES3 has significant refinements, particularly in lens performance, and employs unique lens elements using Canon’s “wavefront engineering” method. Lens testing results show values much smaller than the manufacturing target, in some cases by as much as 30-40%.文件
无文件
CANON
FPA-5000ES3
已验证
类别
193 nm Step and Scan
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
99076
晶圆尺寸：
8"/200mm
年份：
2001
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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CANON
FPA-5000ES3
类别
193 nm Step and Scan
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
99076
晶圆尺寸：
8"/200mm
年份：
2001
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
KrF Scanner配置
无配置OEM 型号描述
The FPA-5000ES3 is a KrF scanner with a 0.73 NA, designed for 130nm production. It is built on the Canon FPA-5000 scanning platform and incorporates experience from previous models. The ES3 has significant refinements, particularly in lens performance, and employs unique lens elements using Canon’s “wavefront engineering” method. Lens testing results show values much smaller than the manufacturing target, in some cases by as much as 30-40%.文件
无文件