说明
无说明配置
CD Performance: -Static accuracy: 3σ (%) < 1.1% -Dynamic accuracy: 1.2nm (3σ) -Throughput (9 sites): 14 wph -Minimum pattern spacing (dense configuration): 40nm Depth Performance: -Static accuracy 3σ (%) < 0.4% -Dynamic accuracy: 0.5nm (3σ) -Minimum pattern spacing (dense configuration): 30nm 3D Imaging: Max scan size 49X49µm Noise 0.1nm RMSOEM 型号描述
未提供文件
无文件
BRUKER
INSIGHT 3DAFM
已验证
类别
AFM
上次验证： 15 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
118263
晶圆尺寸：
12"/300mm
年份：
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
BRUKER
INSIGHT 3DAFM
类别
AFM
上次验证： 15 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
118263
晶圆尺寸：
12"/300mm
年份：
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
CD Performance: -Static accuracy: 3σ (%) < 1.1% -Dynamic accuracy: 1.2nm (3σ) -Throughput (9 sites): 14 wph -Minimum pattern spacing (dense configuration): 40nm Depth Performance: -Static accuracy 3σ (%) < 0.4% -Dynamic accuracy: 0.5nm (3σ) -Minimum pattern spacing (dense configuration): 30nm 3D Imaging: Max scan size 49X49µm Noise 0.1nm RMSOEM 型号描述
未提供文件
无文件