概述

The P-200 ALD tool is specifically optimized for fast and efficient manufacturing of MEMS (MicroElectroMechanical Systems, e.g. sensors and actuators), LEDs (Light-Emitting Diodes), and power electronics components. PICOSUN™ P-200 ALD tool is designed for wafer size 150 mm or 200 mm in batch of 25 wafers. The cornerstones of Picosun ALD system design – unmatched versatility, modularity, and flexibility – are manifested in the variety of automation options available for the P-200 tool: The system can be equipped with a linear inline loader, it can be operated with an industrial robot, connected to a vacuum robot, or integrated with a vacuum load lock, glove box, or mini clean environment.