EDWARDS

pXH4500

IH600-MK5 380

GX100N

iXH6050H

GXS250F

EPX180N

E2M40FF

iPX500

IH80 MK5

iXL750Q

RTC 80

IH1800 MK5

XDS10

XDS 10I

IXL120

The EM range of oil‑sealed rotary pumps – renowned for their high ultimate vacuum, rapid pumping speed, quiet operation and ability to handle vapor 

E2M28

iXH200H

iXH6050HT

A large heat capacity that abates more process gas and offers a reduction in the cost of ownership through SMART technologies

NEPTUNE

RTC 1800

iGX100N

STP-300C

EH250

XDS10-C

E1M40

IH1000 MK1

Atlas Etch

IH1000SC

E1M18

The Pyrophoric Conditioning System (PCS) is a compact, cost-effective unit using the 'self-oxidation' principle to safely remove silane from PECVD and LPCVD process exhausts to below flammable limits

iXH3030TX

GX100L

GX100M

iXH3050HTX

T-STATION 85

iXH3045H

iXH500H

nXDS6i

Atlas™ from Edwards, provides outstanding reliability, excellent powder handling and corrosion resistance, delivering abatement performance for the semiconductor, flat panel display, solar and MOCVD industries.

ATLAS

S150B

iXL500R

i1220HTX

STP A3503C

M150

nXDS15i

iXH100

iXH450H

IH1800SC

GX6 / 100L

TPU STD

CDP80

iGX600M

iXH1210HT

XDS35i

PHX6000

iXH4545HT

T-STATION 300

A38128100

iXL250Q

STP A1303CV2

QDP80 / QMB1200

IXM600T

IXL120N 

XDD1

iXH1220HT

PHMB2400 

iXH6045HT

iXH3030T	

STP-301

pXH6000

IH600 NEW LK

TCS-E

TCU 40/80

nXDS20i

ILS70

iXH1820H

iXH1820T

IH1000 MK5	

GX600N

IH160 MK5

iXH3050H

E2M40 FSPX	

QDP80 / QMB500

STP-A2203WV

iL70N

IH1000

IH1800

IH80

"The QDP80 DRYSTAR Dry pump is available as a stand alone unit or in combination with a QMB500hydrokinetic drive mechanical booster, for applications where more pumping speed and/or lower vacuum levels are required - no pressure switches required.

The scope of supply includes as standard an in-line pressure regulator and gauge for facilitating the shaft seal purge, a cleanable stainless steel exhaust silencer, and exhaust check valve. The QDP80 Drystar dry pump will also be supplied with a full accessory fitting kit and will be mounted to the dedicated chassis and castors to enable easy movement of the pump.

There is no special control system requirements for pump operation, existing electrical control equipment can be modified to provide simple off/on operation and interface to the (fitted) pump thermal snap switches. Details of how to achieve this are available in the Drystar 80 Electrical Box upgrade guide."

QDP80

iXH4550HT

iXH6045H

The Edwards QDP40 is a dry vacuum pump that operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated

QDP40

iXH3030

GX600L

iXH610

E2M18

EPX180LE

PHMB2400 + PRV 

"The iQ Drypumping System is a microprocessor-controlled, modular, dry pump package with advanced control and monitoring capabilities. It can be controlled locally via a handheld LCD panel or remotely through a customized tool interface. All major control elements are conveniently located within the system's footprint.

Equipped with integrated sensors, the iQ dry pumping system continuously monitors critical performance parameters and provides early warning of any issues. These sensors measure motor power, current, total and purge nitrogen flow, pump and motor temperatures, as well as additional parameters like exhaust gas back pressure, oil level, water flow, and exhaust gas temperature.

The iQ pumpset parameters can be easily monitored and displayed through various output devices, including handheld or panel-mounted control modules, local PCs or laptops, and OEM-specified tool interfaces. It offers seamless integration with fab-wide networks for comprehensive monitoring and control.
PC as part of a fab-wide network"

iQDP40

iL70

EDWARDS

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