OLYMPUS

SZ61

SZ40

The Olympus MX50 is a microscope designed for inspecting semiconductors and wafers. It is user-friendly and allows for comfortable operation during extended periods of use. The microscope offers a variety of observation methods, including brightfield, darkfield, differential interference contrast (DIC), and polarized light. Additionally, it has a motorized objective change feature for quick and easy observation changes

MX50

MX50A-F

The STM6 series is a range of measuring microscopes from Olympus that offers more versatility and higher performance than ever before. The series features a wide range of models to meet various customer demands for new measuring capabilities and superior functionality. Some of the models in the range include the STM6-LM, which is designed for fast inspection of large samples, and the high-precision STM6, which has the most compact body in its class. The series also offers many optional units to ensure that every measurement need can be met. Some of the outstanding features of the STM6 series include motorized focusing, advanced UIS2 optics, a high-rigidity body with integrated counters, high-performance long-life LED illumination for bright and clear images, and much more. Overall, the STM6 series is a highly advanced and versatile range of measuring microscopes that offers exceptional levels of precision and durability.

STM6

BX51

The Olympus MX61 is a 200 mm semiconductor inspection microscope that provides exceptional image resolution and clarity through observation methods such as brightfield, darkfield, differential interference contrast (DIC), fluorescence, infrared, and deep UV. It is part of the Olympus Semiconductor & Flat Panel Display Inspection Solution.

MX61

The Olympus MX61L is a microscope designed for inspecting semiconductors with a 300mm frame. It offers high-quality imaging through various observation techniques, including brightfield, darkfield, differential interference contrast (DIC), fluorescence, infrared, and deep UV. This microscope is part of the Olympus Semiconductor & Flat Panel Display Inspection Solution and is an extended frame version of the MX61 microscope, capable of handling 300mm wafers and flat panels up to 24x24 inches.

MX61L

BH2-UMA

BX51M

The Olympus LEXT OLS3000 is a confocal laser scanning microscope that was launched on January 26, 2004. It has the world’s highest resolution of 0.12µm, achieved by using a newly developed optical system optimized for a 408nm semiconductor laser. The microscope also allows for color 3D observations by integrating an optical system used for optical microscopes into the laser system

LEXT OLS3000

SZ51

MX63

BHMJL

"Semiconductor wafer inspection microscope (up to 200 mm) enabling
fast, accurate inspection via motorized aperture stop interlocked with
objective lens. Ergonomic design delivers operator comfort. SEMI S2/S8
compliance ensures safety and reliability."

MX61-F

MX51

SZ30

SZ60

BX41M-LED

OLS31-SU

SZ3060

AL100-L8

BX40

AL120-LMB12-LP3/MX61L

AL110 + MX61

AL110-LMB6

INSPB01

MX61L-F

**PARTS**

AL-1MBL

AL100-LB6	

With an LED illuminator equivalent to or better than a 100 W halogen lamp, the BX53 microscope delivers
outstanding brightness that's ideal for teaching and polarized light applications.

BX53

SZH-ILLK

IX51

BX51TRF

U-AFA1M

BX61	

IX70

KIF-FSPC

IX71

KIF-201

MX80F

MHL 525

STM6-LM

BX60F5

BH3-MJL

AL-100-L6

CKX41SF

OLS5000

BXFMA

The Olympus AL110-LMB86 is an automated wafer loader designed for use with the MX61 microscope. It belongs to the AL110 series of programmable wafer handlers, which are known for their cost-effectiveness and versatility. These features make them an ideal choice when a programmable wafer handler is needed to increase throughput. The AL110 series offers a range of formats, as well as non-contact optical wafer centering and notch detection. It also boasts high-throughput and is class 10 compatible, with a stainless steel facade that makes it suitable for use in clean rooms. Additionally, it can be integrated with an MX50 or MX80 via a manual or motorized shuttle stage, allowing for automated wafer inspections.

AL110-LMB86

AL2000

SZ1145TR

CK40

AL-110-12-LP

AL100-LMB8

BX41RF-LED

MX50T-F

AL110-LMB12/MX50LR

AHMT3

MX-50A 

BH3-MJLA2

The Olympus AL120 is a semiconductor wafer handler with a microscope. It is designed to accommodate different wafer sizes, making it a key tool for expanding wafer fabrication facilities. The AL120 series consists of three models based on wafer diameter: the 200mm model, the 150mm and 200mm convertible model, and the 150mm model for wafer sizes of 150mm or less. Each system is designed for wafer transfer and microscope inspection, with topside and backside macro inspections available for all wafer sizes. The 360-degree self-rotating function provides a complete macro inspection of the wafer’s top and back surface, enabling easy identification of defects and particles

AL120

AL100-LM6

SZ4045

AL110-LMB12-LP2/MX61L-F	

IX70-S8F2

AL120-LMB6-150

MX-40

BX6OMF

OLS4000

The UC50 is a 5 megapixel digital color camera ideal for high resolution imaging providing 14-bit a wide dynamic range and high sensitivity along with a variety of frame rates using pixel binning and partial readout modes.

CCD chip
The 2,576 x 1,932-pixel CCD chip used in the UC50 offers 14 bits per color channel and can be used for variable exposure times between 100 μs and 160 s. These features, along with the high sensitivity, color fidelity, and superior contrast make the UC50 a great universal high-resolution color camera.

UC50

5900PR

AL-1MBL-6

The LEXT OLS4100 3D measuring laser microscope uses laser scanning to perform non-contact 3D measurement of complex surface features on electronic devices and other samples. As with current Olympus models, the LEXT OLS4100 guarantees both repeatability*1 and accuracy*2, while also being capable of high-resolution observation and highly accurate measurement over a wider area. It also features easier operation, including a function for acquiring 3D images automatically with a single click, and an image acquisition speed that is approximately twice as fast as the existing Olympus models.

LEXT OLS4100

AL3100

AL3130F

The FV1000 confocal laser scanning biological microscope was released in 2004.
This model featured the world's first twin scan system. This system enabled time-resolved spectroscopy of living intercellular contents and also made it possible to analyze objects down to a 2 nm wavelength resolution. Image size was increased to 4096 x 4096-pixels.

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