
说明
Stripper/Asher配置
无配置OEM 型号描述
The GAMMA Express, introduced in 2006, is a high productivity resist strip system designed to meet the technology requirements for 45 nanometer manufacturing. GAMMA Express performs high dose implant strip (HDIS) and incorporates non-oxidizing processes for advanced silicides and low-k dielectric films. The redesigned GAMMA Express platform offers a new direct-drive wafer handling subsystem, as well as a new high ash rate source.文件
无文件
类别
Ashers / Plasma Cleaner
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
30953
晶圆尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / NOVELLUS / GASONICS
GAMMA EXPRESS
类别
Ashers / Plasma Cleaner
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
30953
晶圆尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Stripper/Asher配置
无配置OEM 型号描述
The GAMMA Express, introduced in 2006, is a high productivity resist strip system designed to meet the technology requirements for 45 nanometer manufacturing. GAMMA Express performs high dose implant strip (HDIS) and incorporates non-oxidizing processes for advanced silicides and low-k dielectric films. The redesigned GAMMA Express platform offers a new direct-drive wafer handling subsystem, as well as a new high ash rate source.文件
无文件