Novellus acquired Gasonics in 2001. Novellus now offers a suite of advanced photoresist strip and clean products.

LAM RESEARCH / NOVELLUS / GASONICS

The PEP 3510Plus is a sophisticated system designed for the damage-free removal of photoresist. It is a dual chamber microwave downstream photoresist removal system that uses a combination of platen and lamp wafer heating to achieve high strip rates, resulting in high throughput. This production-proven system is commonly used for bulk photoresist removal and descum applications. Its advanced technology ensures efficient and effective photoresist removal.

PEP 3510plus

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LAM RESEARCH / NOVELLUS / GASONICS

PEP 3510plus

Ashers / Plasma Cleaner

类似上架物品

LAM RESEARCH / NOVELLUS / GASONICS

PEP 3510plus

PEP 3510plus

Ashers / Plasma Cleaner

类似上架物品

LAM RESEARCH / NOVELLUS / GASONICS

PEP 3510plus