说明
无说明配置
Application: Oxide Polisher: 4 polish turn table Top Ring:AI head GII x4 Load/Unload port:3 Load ports Endpoint: TCM / Optical(S-OPM) Equipped on table B and D Slurry Delivery : Flow control valve With CLC Lines each table AMHS: OHT Operation panel: 3 Touch panels Cleaner module : 3 cleaner and 1 dryer stations Cleaner Type: Horizontal Type Dryer: Spin Rinse DrOEM 型号描述
The Ebara FREX 300 S is a 300mm CMP system, featuring a four-head, four-platen design with a three-step clean process. It reliably meets 7nm tech requirements, providing development and production flexibility, and best-in-class reliability and cost of ownership.文件
无文件
EBARA
F-REX300S
已验证
类别
CMP
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
34636
晶圆尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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F-REX300S
已验证
类别
CMP
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
34636
晶圆尺寸:
未知
年份:
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Application: Oxide Polisher: 4 polish turn table Top Ring:AI head GII x4 Load/Unload port:3 Load ports Endpoint: TCM / Optical(S-OPM) Equipped on table B and D Slurry Delivery : Flow control valve With CLC Lines each table AMHS: OHT Operation panel: 3 Touch panels Cleaner module : 3 cleaner and 1 dryer stations Cleaner Type: Horizontal Type Dryer: Spin Rinse DrOEM 型号描述
The Ebara FREX 300 S is a 300mm CMP system, featuring a four-head, four-platen design with a three-step clean process. It reliably meets 7nm tech requirements, providing development and production flexibility, and best-in-class reliability and cost of ownership.文件
无文件