概述

The ProCell is designed for 200-mm advanced fabrication processes with line widths of .18 micron and beyond. The ProCell, which can process more than 40 wafers simultaneously offers scalability from 200-mm to-300-mm wafers and significant productivity improvement for the coat and develop process through the use of ProCell’s symmetrical cluster configuration. The ProCell has enhanced reliability, uniformity in process results and serviceability due to the use of a single software platform, cell based design and the use of isolated process and coat environments.