
说明
无说明配置
Configuration : 4C3D + 1Tarc Unit Main Controller Typ has one HDD. Equipment is on standby since May 2025 ( not in production line) The central media supply is still connected, resistors are uninstalled, resist pumps are under solvent. The system is complete with all parts.OEM 型号描述
CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.文件
无文件
类别
Coaters & Developers
上次验证: 昨天
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
128764
晶圆尺寸:
8"/200mm
年份:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ACT 8
类别
Coaters & Developers
上次验证: 昨天
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
128764
晶圆尺寸:
8"/200mm
年份:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Configuration : 4C3D + 1Tarc Unit Main Controller Typ has one HDD. Equipment is on standby since May 2025 ( not in production line) The central media supply is still connected, resistors are uninstalled, resist pumps are under solvent. The system is complete with all parts.OEM 型号描述
CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.文件
无文件