概述

Induction Heated Furnace for Silicon Carbide with Process Technology • Fully automated, turnkey furnace with processes available for maximum productivity • The growth process begins with push button loading starts automated process • The growth process can also be operated in manual mode for R&D purposes • SP-150 is the first 200mm (8”) capable furnace sold commercially • Coil movement during growth as low as 20μm per step • Base pressure of 10-7 mbar for the best purity, repeatability and quality • User-friendly proprietary Aymont automated PLC control with recipes, color touch screen and safety interlocks/alarms • Crucible rotation at 0.5 to 20 RPM for maximum uniformity and repeatability • Process can be operated using simple or complex power control, or temperature control using two-color pyrometers • Device-quality and thick crystals with optional process demonstration