说明
Description Dimension Qty MAIN FRAME 94 102 90 1 SYSTEM CONTROLLER 44 48 86 1 RF GENERATOR RACK 1 25 45 46 1 RF GENERATOR RACK 2 25 45 46 1 RF GENERATOR RACK 3 25 45 46 1 SMC CHILLER 33 50 67 1 ASYST SMIF 1 22 24 63 1 ASYST SMIF 2 19 23 64 1 MONITOR RACK 1 28 26 46 1 MONITOR RACK 2 25 19 45 1 MONITOR RACK 3 26 25 80 1 BULK CONTR-1: CABLES, MISC PARTS 41 48 35 1 BULK CONTR-2: CABLES, MISC PARTS 41 48 35 1 MISSING 1. EXHAUST BOX 2. CHILLER DI FILTER TANK X 2EA 3. CHILLER COOLANT BLOCK 2EA 4. LOADLOCK DOOR COVER X2EA配置
OEM : AMAT MODEL : CENTURA Ultima+ HDPCVD PROGRESS TYPE: FSG/USG CHAMBER POSITION: CH #A - HDP ULTIMA PLUS CH #B - HDP ULTIMA PLUS CH #C - HDP ULTIMA PLUS CH #D - EMPTY CH #E - EMPTY CH #F - ORIENT CHAMBER ROBOT : HP ROBOT, FABWORX ARM TURBO PUMP : EBARA ET1600WS RF GENERATOR : ENI NOVA-50/ ENI GHW-50 CONTROLLER: 84 INCH COMMON CONTROLLER DRY PUMP : N/A CHILLER : SMC_INR-498-P025OEM 型号描述
The Applied Centura Ultima HDP CVD 200mm and 300mm systems deliver a high-density plasma CVD process. It has been the industry-leading workhorse delivering high-quality dielectric films and void-free gapfill. Its reactor enables customers to achieve the productivity, cost-efficiency, and extendibility needed for multi-generation manufacturing.文件
类别
CVD
上次验证： 23 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127823
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA ULTIMA HDP-CVD
类别
CVD
上次验证： 23 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127823
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available