概述

Continuous APCVD for 12 inch wafers. 12 inch wafer. Continuous APCVD system, based on long term AMAX Series. Developed wider area deposition dispersion head and minimize the number of trays to reduce the cost of system. SiC Trays as susceptors prevent heavy metal addition and help long term stable process for long term production. Good maintainability and Operators safety are given by automated head base lifting system and automated tray exchange system, that shorten PM time for longer use of system.