说明
无说明配置
Process Atomosphere pressure CVD (BPSG) Wafer Size 200MM Wafer Shape Notch Wafer Cassette 8" Plastic Miraial SMIF Interface NO <1> Enclosure 1. Door 2.Load window 3.Clean unit Spec. ULPA Filter (0.1μm) <2> Wafer Handrinｇ 1. Casette stage Stage# Casette x2, Dummy casette x1 Wafer size 5-8 inch combination 2. Cooling station 3. Wafer handring robot Function Back surface adsorption Alignment of orientation flat Model GENMARK GENCOBOT Ⅳ 4. Elevator Wafre guide size 8 inch 5. Index table Susceptor Material: SiC Guide ring Material: Quarts Heat shield Material: SUS Susceptor support Material: SUS Rotation table <3> Process gas supply 1. AFC box MFC Aera FC-782/781 Filter Pall GLF6101/GLFPF8101 Regulator Tescom 44-3200 Air operated valve Fujikin MEGA-ONE 2. Bubbling unit 3. Heat pipe <4> Other supply 1. Air supply Aux N2, Vac. Gen N2 2. Colling water <5> Process reaction 1. Disversion head (D/H) 2. Reactor heater <6> Exhaust 1. Enclosure exhaust damper 2. Reactor exhaust damper 3. Reactor exhaust pipe unit 4. Manometer unit General exhaust Process exhaust 5. Drain tank system Tank capacity 10 little 6. Ozone treatment machine Method Catalyst system 7. Rotary brush Method Brush up + Vacuum <7> Sub system 1. Ozonizer Model Sumitomo Seimitsu SGN-04CUA 2. Liquid source supply system Spec. TEOS, TMOP, TEB 3. Chillor unit Model NESLAB CFT-25 <8> Conrol & Electric equipment 1. User interface Computor, Display, Key board 2. System controller VME controller Robot controller Rotation controller Temperature controller 3. Maintenance PC IBM compatible 4. Electric equipment <9> Safety 1. Gas detection unit Model Shincosmos Electric V880 2. UPS Model CLARY UPS1-1.25k-1G 3. Interlock 4. EMO x4OEM 型号描述
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无文件
CANON
APT-5800
已验证
类别
CVD
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
18315
晶圆尺寸：
8"/200mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON
APT-5800
已验证
类别
CVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
18315
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Process Atomosphere pressure CVD (BPSG) Wafer Size 200MM Wafer Shape Notch Wafer Cassette 8" Plastic Miraial SMIF Interface NO <1> Enclosure 1. Door 2.Load window 3.Clean unit Spec. ULPA Filter (0.1μm) <2> Wafer Handrinｇ 1. Casette stage Stage# Casette x2, Dummy casette x1 Wafer size 5-8 inch combination 2. Cooling station 3. Wafer handring robot Function Back surface adsorption Alignment of orientation flat Model GENMARK GENCOBOT Ⅳ 4. Elevator Wafre guide size 8 inch 5. Index table Susceptor Material: SiC Guide ring Material: Quarts Heat shield Material: SUS Susceptor support Material: SUS Rotation table <3> Process gas supply 1. AFC box MFC Aera FC-782/781 Filter Pall GLF6101/GLFPF8101 Regulator Tescom 44-3200 Air operated valve Fujikin MEGA-ONE 2. Bubbling unit 3. Heat pipe <4> Other supply 1. Air supply Aux N2, Vac. Gen N2 2. Colling water <5> Process reaction 1. Disversion head (D/H) 2. Reactor heater <6> Exhaust 1. Enclosure exhaust damper 2. Reactor exhaust damper 3. Reactor exhaust pipe unit 4. Manometer unit General exhaust Process exhaust 5. Drain tank system Tank capacity 10 little 6. Ozone treatment machine Method Catalyst system 7. Rotary brush Method Brush up + Vacuum <7> Sub system 1. Ozonizer Model Sumitomo Seimitsu SGN-04CUA 2. Liquid source supply system Spec. TEOS, TMOP, TEB 3. Chillor unit Model NESLAB CFT-25 <8> Conrol & Electric equipment 1. User interface Computor, Display, Key board 2. System controller VME controller Robot controller Rotation controller Temperature controller 3. Maintenance PC IBM compatible 4. Electric equipment <9> Safety 1. Gas detection unit Model Shincosmos Electric V880 2. UPS Model CLARY UPS1-1.25k-1G 3. Interlock 4. EMO x4OEM 型号描述
未提供文件
无文件