概述

NanoUDI 9300 standalone wafer particle and defect inspection system. The NanoUDI 9300 stand-alone, high throughput, full-wafer defect inspection system detects and measures particles and defects as small as 0.1 microns on 300 millimeter diameter semiconductor wafers. The system was first introduced at SEMICON West in July 2002 and is built on the common 9300 wafer automation platform that includes the new industry standards for 300 millimeter wafer handling.