Our highest-resolution e-beam system to date, the eP5 offers critical dimension (CD) metrology and defect detection at high throughput.

ASML to acquire HMI to enhance Holistic Lithography product portfolio.

HMI has been committed to the research and development of the most advanced E-beam Inspection (EBI) tools and solutions for the leading semiconductor manufacturing fabs. Today, HMI is the leading supplier of EBI tools for both foundry and memory fabs worldwide. Based on our proprietary electron gun and column technologies and highly effective defect inspection algorithms, we deliver multiple product lines, including eScan® Series / ePTM Series / eXplore® Series, for various R&D and production applications.

eP5

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