Fast e-beam inspection for process development and production monitoring for 3D NAND and other advanced chips. The HMI eScan 430 is a high-throughput e-beam wafer inspection system, capable of detecting patterning and electrical defects.

ASML to acquire HMI to enhance Holistic Lithography product portfolio.

HMI has been committed to the research and development of the most advanced E-beam Inspection (EBI) tools and solutions for the leading semiconductor manufacturing fabs. Today, HMI is the leading supplier of EBI tools for both foundry and memory fabs worldwide. Based on our proprietary electron gun and column technologies and highly effective defect inspection algorithms, we deliver multiple product lines, including eScan® Series / ePTM Series / eXplore® Series, for various R&D and production applications.

eScan 430

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