概述

The Candela OSA 6100 and 6120 series systems introduce X-Beam channel technology, adding radial illumination to the existing circumferential illumination design, plus advanced collection optics that extend defect sensitivity down to 80nm. This multi-channel system simultaneously detects and classifies defects such as particles, pits and stains; characterizes lubricant thickness, and uses the Kerr Effect to characterize magnetic imaging.