概述

The KLA 2132 is an all pattern inspection model introduced by KLA, a company that produces inspection equipment for microprocessors, logic devices, and memory devices. It is part of the 2100 series and was introduced after the 2131 and before the 2135. Compared to its predecessor, the 2132 has greater sensitivity and maximum speed. The 2135, which was introduced in 1996, has twice the throughput and higher sensitivity compared to the 2132.