The 2360 High-Resolution Imaging Inspection System uses UV illumination and high numerical aperture to deliver superior resolution and material contrast for inspection of all process layers. It accelerates time to classified results and improves yield with Inline Automatic Defect Classification (iADC) and is compliant with SEMI 300-mm automation standards. It is ideal for new technologies in advanced 200-mm and 300-mm fabs, with particular effectiveness for critical etch, critical CMP, photo, and engineering analysis. It is part of the industry’s only comprehensive defect inspection system that addresses all stages of semiconductor manufacturing, from development through production.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

2360

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