The 2371 is a next-generation, ultra-broadband brightfield patterned wafer inspector designed for sub-65-nm design rule development and ramp. It provides increased defect detection, resolution, and sensitivity through flexible broadband deep ultraviolet (DUV) illumination and optical modes. It also offers superior resolution, sensitivity, material contrast, noise suppression, real-time defect classification, and SEMI compliance. The 23xx series, eS31, and AIT series combine to form a comprehensive defect inspection solution for all stages of semiconductor manufacturing.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

2371

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