KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.

说明

配置

OEM 型号描述

文件

KLA

SP1 DLS

Defect Inspection

物品主要详细信息

类似上架物品

KLA

SP1 DLS

KLA

SP1 DLS

KLA

SP1 DLS

KLA

SP1 DLS

SP1 DLS

Defect Inspection

物品主要详细信息

说明

配置

OEM 型号描述

文件

类似上架物品

KLA

SP1 DLS

KLA

SP1 DLS

KLA

SP1 DLS

KLA

SP1 DLS