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说明
无说明配置
KLA SP5 Main Components - • Integrated Console • Bare Wafer Inspection Station • Equipment Front End Module (EFEM) • 3 Port Wafer Loading Unit Description of Inspection System - • Un-patterned wafer inspection platform to incorporate deep-ultraviolet (DUV) illumination. Deep Ultraviolet(DUV) source • DUV-specific apertures to enable defect capture on un-patterned thin films • High speed stage and advanced imaging computer for enhanced productivity • Full-wafer high-resolution haze maps Defect Detection and Classification Capabilities • Designed to capture a broad range of challenging defects for 2Xnm/1Xnm process nodes • High-productivity rapid automated defect classification • Coordinate accuracy to enable rapid defect re-detection and review • Integrated, high resolution (~100 mega-pixel), full-wafer SURFmonitor™ haze maps, providing automated capture of ultra-fine slip lines and scratches or maps of surface roughness, grain size and other process parameters • Surfscan SP5 system feature dramatic advances in sensitivity and throughput over their industry-benchmark predecessor, the Surfscan SP3. • Inspection Module for the back side of wafers for defects that might deform the wafer shapeOEM 型号描述
The Surfscan SP5 is a high-throughput, DUV-sensitive system for inspecting unpatterned wafer surfaces. It’s used in IC, substrate, and equipment manufacturing at the 2X/1Xnm design nodes.文件
类别
Defect Inspection
上次验证： 12 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
130028
晶圆尺寸：
未知
年份：
2019
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
SURFSCAN SP5
类别
Defect Inspection
上次验证： 12 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
130028
晶圆尺寸：
未知
年份：
2019
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available