说明
BARE WAFER INSPECTION配置
config detail attached KLA SP5 Main Components - Integrated Console Bare Wafer Inspection Station Equipment Front End Module (EFEM) 3 Port Wafer Loading Unit Description of Inspection System - Un-patterned wafer inspection platform to incorporate deep-ultraviolet (DUV) illumination. Deep Ultraviolet(DUV) source DUV-specific apertures to enable defect capture on un-patterned thin films High speed stage and advanced imaging computer for enhanced productivity Full-wafer high-resolution haze maps Defect Detection and Classification Capabilities Designed to capture a broad range of challenging defects for 2Xnm/1Xnm process nodes High-productivity rapid automated defect classification Coordinate accuracy to enable rapid defect re-detection and review Integrated, high resolution (~100 mega-pixel), full-wafer SURFmonitor™ haze maps, providing automatedcapture of ultra-fine slip lines and scratches or maps of surface roughness, grain size and other processparameters Surfscan SP5 system feature dramatic advances in sensitivity and throughput over their industry-benchmarkpredecessor, the Surfscan SP3. Inspection Module for the back side of wafers for defects that might deform the wafer shape.OEM 型号描述
The Surfscan SP5 is a high-throughput, DUV-sensitive system for inspecting unpatterned wafer surfaces. It’s used in IC, substrate, and equipment manufacturing at the 2X/1Xnm design nodes.文件
KLA
SURFSCAN SP5
已验证
类别
Defect Inspection
上次验证： 4 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
115330
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
SURFSCAN SP5
类别
Defect Inspection
上次验证： 4 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
115330
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available