说明
BARE WAFER INSPECTION配置
config detail attached KLA SP5 Main Components - Integrated Console Bare Wafer Inspection Station Equipment Front End Module (EFEM) 3 Port Wafer Loading Unit Description of Inspection System - Un-patterned wafer inspection platform to incorporate deep-ultraviolet (DUV) illumination. Deep Ultraviolet(DUV) source DUV-specific apertures to enable defect capture on un-patterned thin films High speed stage and advanced imaging computer for enhanced productivity Full-wafer high-resolution haze maps Defect Detection and Classification Capabilities Designed to capture a broad range of challenging defects for 2Xnm/1Xnm process nodes High-productivity rapid automated defect classification Coordinate accuracy to enable rapid defect re-detection and review Integrated, high resolution (~100 mega-pixel), full-wafer SURFmonitor™ haze maps, providing automatedcapture of ultra-fine slip lines and scratches or maps of surface roughness, grain size and other processparameters Surfscan SP5 system feature dramatic advances in sensitivity and throughput over their industry-benchmarkpredecessor, the Surfscan SP3. Inspection Module for the back side of wafers for defects that might deform the wafer shape.OEM 型号描述
The Surfscan SP5 is a high-throughput, DUV-sensitive system for inspecting unpatterned wafer surfaces. It’s used in IC, substrate, and equipment manufacturing at the 2X/1Xnm design nodes.文件
KLA
SURFSCAN SP5
已验证
类别
Defect Inspection
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
115330
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
SURFSCAN SP5
类别
Defect Inspection
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
115330
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available