In 1992, KLA introduced the KLA 2130 which is capable of "all pattern" inspection required for microprocessors and other logic devices as well as both the logic and repeating array portions of memory devices.
KLA-2130 wafer inspection system, resolution of 0.25 micron, die-to-die comparison, inspection rates range from 15 sec/cm^ at 0.5-micron resolution to 70 sec/cm^ at 0.25-inicron resolution for random mode.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

2130

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