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市场 > Defect Inspection > KLA > Voyager 1015

Voyager 1015

概述

For patterned wafer optical inspection, KLA launched the Voyager 1015 Series during the fiscal year ended June 30, 2018. The Voyager 1015 laser scanning patterned wafer inspection system provides enhanced defect capture for high throughput lithography cell monitoring, as well as other production ramp monitoring applications.

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