说明
无说明配置
Main System: ASM A412 SMIF System: E84, SECS/GEM, GEM300 Software Version: 6.85B Tool's Recipe Capability: Batch Does the tool have a SECS/GEM interface? Yes How many ports does this tool have? 2 Protocol Zones Allowed: FEOL Chamber ID's or Station ID's Chamber or Station Description RC1BOATA Node Nitride; Reactor1 Boat A RC1BOATB Node Nitride; Reactor1 Boat B RC2BOATA Node Nitride; Reactor2 Boat A RC2BOATB Node Nitride; Reactor2 Boat B RC1 Reactor 1 RC2 Reactor 2OEM 型号描述
The ASM A412 is a vertical furnace system with a proven track record of more than 1,000 reactors shipped to customers worldwide and over 22 years of maturity in semiconductor manufacturing.文件
无文件
ASM
A412
已验证
类别
Furnaces / Diffusion
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
50603
晶圆尺寸:
12"/300mm
年份:
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部ASM
A412
已验证
类别
Furnaces / Diffusion
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
50603
晶圆尺寸:
12"/300mm
年份:
2011
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Main System: ASM A412 SMIF System: E84, SECS/GEM, GEM300 Software Version: 6.85B Tool's Recipe Capability: Batch Does the tool have a SECS/GEM interface? Yes How many ports does this tool have? 2 Protocol Zones Allowed: FEOL Chamber ID's or Station ID's Chamber or Station Description RC1BOATA Node Nitride; Reactor1 Boat A RC1BOATB Node Nitride; Reactor1 Boat B RC2BOATA Node Nitride; Reactor2 Boat A RC2BOATB Node Nitride; Reactor2 Boat B RC1 Reactor 1 RC2 Reactor 2OEM 型号描述
The ASM A412 is a vertical furnace system with a proven track record of more than 1,000 reactors shipped to customers worldwide and over 22 years of maturity in semiconductor manufacturing.文件
无文件