​​The Advance is our comprehensive range of batch vertical furnaces optimized to meet the needs of advanced semiconductor applications. Vertical batch processing increases productivity because a large stac​k of wafers can be loaded into the furnace chamber for simultaneous thermal processing.The A412 PLUS is for 300mm wafers.

ASM is a supplier of semiconductor process equipment for wafer processing, including lithography, deposition, ion implant and single-wafer epitaxy. ASM is part of the ASM International NV group that also includes ASM Pacific Technology (ASMPT). ASMPT, in which ASMI holds a substantial ownership is a leading supplier of semiconductor process equipment for wafer assembly and packaging, and for surface mount technology.



A412 Plus

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