说明
无说明配置
<b>Centura Mainframe</b> Position A : CxZ Gigafill SACVD SACVD Position B : CxZ Gigafill SACVD SACVD Position C : NA NA Position D : NA NA Position E : Multi-Slot Cooldown Cooldown Position F : NA NA <b>Mainframe Items</b> • Stand-Alone Install • Software Version : B3524 • CE Mark Certified• Signal Lamp Tower • Wide Body Loadlock Fast Wafer Mapping Wafer Slide Sensor • Bolt-On-SMIF: ASYST LPT2200 • HP Robot Type Blade Type : QUARTZ • Enhanced (OTF) Wafer on Blade Sensor • SBC Version : V452 • Remote Service Monitors • GEMS <b>CxZ Gigafill Chamber </b> • Heater Type : Ceramic • Dual Manometer Type : 20:1000T • Direct Drive Dual Spring Throttle Valve w/C Plug • Endpoint Detector : NO • ATM Switch : 740T • Cover Plate : STANDARD • Blocker Plate : 0021-01569 • Blocker Plate Part # : 0021-01569 • Faceplate Part # : 0021-01571 • Chamber Clean : RPS • Astex Remote Microwave Clean : NO <b>Pumps</b> • Depostion Chamber Pump: Qty 2 ALCATEL ADS602P • Load Lock Pump: ALCATEL ADS100P • Transfer Chamber Pump: ALCATEL ADS100P • Neslab Chiller HX300 • AMAT 0 Heat Exchanger <b>Gas Panel</b> • Gas Delivery Type/SLD • Gas Panel Interface Type : STANDARD • Gas Panel Exhaust : LEFT • Liquid Delivery Type : PLIS • DTLR Availability : TEOS/TEB/TEPO • Ozone Delivery : MONITOR <b>Gas Box Configuration</b> Gas Line # Gas Flow (sccm) MFC Mfgr. MFC Model 1 O2 10000 AERA FC-D980C 2 NF3 2000 AERA FC-D980C 3 AR 5000 AERA FC-D980C 4 AERA FC-D980C 5 AERA FC-D980C 6 HE-HI 10000 AERA FC-D980C 7 HE-LO 3000 AERA FC-D980C 8 TEB 200 STEC IV-2410AV-O2H 9 TEOS 3000 STEC IV-2410AV-O2H 10 TEPO 200 STEC IV-2410AV-O2H 41 O3 10000 AERA FC-D980COEM 型号描述
The AMAT / APPLIED MATERIALS Centura 5200 is an Etchers & Ashers system. The centura 5200 can be used with 8” wafer size and oxidation etchers size is also 8”. The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.文件
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APPLIED MATERIALS (AMAT)
CENTURA 5200
已验证
类别
Dry Etch
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
11968
晶圆尺寸：
8"/200mm
年份：
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA 5200
已验证
类别
Dry Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
11968
晶圆尺寸：
8"/200mm
年份：
2003
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
<b>Centura Mainframe</b> Position A : CxZ Gigafill SACVD SACVD Position B : CxZ Gigafill SACVD SACVD Position C : NA NA Position D : NA NA Position E : Multi-Slot Cooldown Cooldown Position F : NA NA <b>Mainframe Items</b> • Stand-Alone Install • Software Version : B3524 • CE Mark Certified• Signal Lamp Tower • Wide Body Loadlock Fast Wafer Mapping Wafer Slide Sensor • Bolt-On-SMIF: ASYST LPT2200 • HP Robot Type Blade Type : QUARTZ • Enhanced (OTF) Wafer on Blade Sensor • SBC Version : V452 • Remote Service Monitors • GEMS <b>CxZ Gigafill Chamber </b> • Heater Type : Ceramic • Dual Manometer Type : 20:1000T • Direct Drive Dual Spring Throttle Valve w/C Plug • Endpoint Detector : NO • ATM Switch : 740T • Cover Plate : STANDARD • Blocker Plate : 0021-01569 • Blocker Plate Part # : 0021-01569 • Faceplate Part # : 0021-01571 • Chamber Clean : RPS • Astex Remote Microwave Clean : NO <b>Pumps</b> • Depostion Chamber Pump: Qty 2 ALCATEL ADS602P • Load Lock Pump: ALCATEL ADS100P • Transfer Chamber Pump: ALCATEL ADS100P • Neslab Chiller HX300 • AMAT 0 Heat Exchanger <b>Gas Panel</b> • Gas Delivery Type/SLD • Gas Panel Interface Type : STANDARD • Gas Panel Exhaust : LEFT • Liquid Delivery Type : PLIS • DTLR Availability : TEOS/TEB/TEPO • Ozone Delivery : MONITOR <b>Gas Box Configuration</b> Gas Line # Gas Flow (sccm) MFC Mfgr. MFC Model 1 O2 10000 AERA FC-D980C 2 NF3 2000 AERA FC-D980C 3 AR 5000 AERA FC-D980C 4 AERA FC-D980C 5 AERA FC-D980C 6 HE-HI 10000 AERA FC-D980C 7 HE-LO 3000 AERA FC-D980C 8 TEB 200 STEC IV-2410AV-O2H 9 TEOS 3000 STEC IV-2410AV-O2H 10 TEPO 200 STEC IV-2410AV-O2H 41 O3 10000 AERA FC-D980COEM 型号描述
The AMAT / APPLIED MATERIALS Centura 5200 is an Etchers & Ashers system. The centura 5200 can be used with 8” wafer size and oxidation etchers size is also 8”. The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.文件
无文件