概述

The Unity II is a platform introduced by TEL in 1995. It has gained a solid reputation for being one of the most reliable platforms available, with over 800 systems delivered to customers worldwide. In 1998, the Unity was recognized as the World Leader in Etch System Performance in the prestigious VLSI Customer Satisfaction Survey. The Unity II is a 2 chamber tool, focused on 200mm wafers, and various configurations are offered for wafer sizes from 150 to 300mm. It is a testament to its reliability and performance.