说明
Description Dimension Qty Main Frame 85X97X93 1 System Controller 43X39X86 1 Generator Rack 44X24X83 1 Temperature Control Unit 41X25X45 1 HX-150 CHX 1 36X26X39 1 HX-150 CHX 2 36X26X39 1 HX-150 CHX 3 36X26X39 1 Monitor/Endpoint Rack 27X22X40 1 Pallet-1: Misc parts (tote boxes) 49X41X37 1配置
OEM : AMAT MODEL : Centura MXP WAFER SIZE: 8 INCH PROGRESS TYPE: CHAMBER POSITION: CH #A - MXP CH #B - MXP CH #C - MXP CH #D - MXP CH #E - EMPTY CH #F - Orienter BUFFER ROBOT : HP+ LOADLOCK ROBOT : N/A FACTORY INTERFACE : RORZE CHILLER #1 : NESLAB HX-150 CHX CHILLER #2 : NESLAB HX-150 CHX CHILLER #3 : NESLAB HX-150 CHILLER #4 : ATS TEMPERATURE CONTROL UNIT CH #A CONFIG MXP - C/M : - RF MATCHING UNIT : - RF GENERATOR : - MFC #1 : - MFC #2: - MFC #5: - MFC #6: - MFC #7: - MFC #8: - MFC #9: - MFC #10: CH #B CONFIG MXP - C/M : -RF MATCHING UNIT : - RF GENERATOR : OEM 12B3 - MFC #1 : - MFC #2: - MFC #5: - MFC #6: - MFC #7: - MFC #8: - MFC #9: - MFC #10: CH #C CONFIG MXP - C/M : - RF MATCHING UNIT : - RF GENERATOR : OEM 12B3 - MFC #1 : - MFC #2: - MFC #5: - MFC #6: - MFC #7: - MFC #8: - MFC #9: - MFC #10: CH #D CONFIG MXP - C/M : - RF MATCHING UNIT : - RF GENERATOR : OEM 12B3 - MFC #1 : - MFC #2: - MFC #5: - MFC #6: - MFC #7: - MFC #8: - MFC #9: - MFC #10: CH #E CONFIG CH#F CONFIG ORIENTER L/L CONFIG : WIDE BODY BUFFER CONFIGOEM 型号描述
This multi-chamber machine consists of one central transfer module with a magnetic vacuum robot surrounded by multiple processing stations and chambers. Chambers types include: MXP+, MXP Poly, and orienters. Applications of Centura MXP include etch, CVD, ALD, epitaxy, photomask fabrication, plasma doping, plasma nitridation, PVD, and RTP. In July 1994, Applied Materials introduced the Metal Etch MxP Centura, which combines sub-0.5 micron process technology with improved throughput.文件
类别
Dry / Plasma Etch
上次验证： 12 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127817
晶圆尺寸：
8"/200mm
年份：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA MxP
类别
Dry / Plasma Etch
上次验证： 12 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127817
晶圆尺寸：
8"/200mm
年份：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available