说明
Description Dimension Qty Main Frame 60 X 70 X 76 1 Factory Interface 69 X 41 X 99 1 System Controller 21 X 26 X 80 1 Chamber 58 X 46 X 79 1 Chiller 20 X 43 X 26 1 Monitor Stand w/monitor 28 X 28 X 59 1 Load port #1 19 X 20 X 54 1 Load port #2 19 X 20 X 54 1 Tote #1, (Large Pallet Tote) 41 X 40 X 37 1 Bundle of 2 corner panels 4 X 4 X 92 1配置
OEM : Applied Materials MODEL : Centura WAFER SIZE: 8 INCH (300mm mainframe, 200mm ESC) PROGRESS TYPE: CHAMBER POSITION: CH #A - DPS II BMA CH #B - EMPTY CH #C - EMPTY CH #C - EMPTY CH #E - EMPTY CH #F - EMPTY Buffer ROBOT : XPV FACTORY INTERFACE AMAT LOADPORT A ASYST VERSAPORT MOCHA LOADPORT B ASYST VERSAPORT MOCHA CHILLER #1 : THERMOCON CHILLER #2 : THERMO NESLAB CH #A CONFIG DPS II BMA - TURBO : BOC EDWARDS - TURBO CONTROLLER: STP-A2503PV - C/M : - RF MATCHING UNIT : - SOURCE RF GENERATOR : APEX - BIAS RF GENERATOR : APEX - MFC #1 : CH #B CONFIG EMPTY . - C/M : - BIAS RF MATCHING UNIT : - TOP RF MATCHING UNIT : - BIAS RF GENERATOR : - BIAS RF GENERATOR : - MFC #1 : - MFC #2 : - MFC #3 : CH #D CONFIG EMPTY - TURBO : - C/M : - BIAS RF MATCHING UNIT : - TOP RF MATCHING UNIT : - BIAS RF GENERATOR : - BIAS RF GENERATOR : - MFC #1 : - MFC #2 : - MFC #3 : CH #E CONFIG EMPTY - TURBO : - C/M : - BIAS RF MATCHING UNIT : - TOP RF MATCHING UNIT : - BIAS RF GENERATOR : - BIAS RF GENERATOR : - MFC #1 : - MFC #2 : - MFC #3 : CH#F CONFIG EMPTY L/L CONFIG - WIDE BODY BUFFER CONFIG - HP ROBOTOEM 型号描述
未提供文件
类别
Dry / Plasma Etch
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127841
晶圆尺寸：
8"/200mm
年份：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部
APPLIED MATERIALS (AMAT)
CENTURA DPS II POLY
类别
Dry / Plasma Etch
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127841
晶圆尺寸：
8"/200mm
年份：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available