CENTURA RPS
概述
The Remote Plasma Source (RPS) Centura, introduced in June 1995, extended the AMAT range of dielectric dry etch process technologies to several isotropic etch steps.
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The Remote Plasma Source (RPS) Centura, introduced in June 1995, extended the AMAT range of dielectric dry etch process technologies to several isotropic etch steps.
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检验、保险、评估、物流