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De-installed Equipment usage and function description 12-inch wafer plasma reaction chambers Missing parts No配置
Item Configuration Chamber DPSII RF System Bias generator V Source generator V bias match V HV module V Vacuum system Turbo pump V ISO valve V Pumping Line V Dual Gas feed system Gas line V ISO valve V EPD system Eye-D controller X Electric system AC distribute V DC power supply V Other Heater pad & ring V Source inner coil V Swap kits (9 pcs) VOEM 型号描述
未提供文件
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
109727
晶圆尺寸：
12"/300mm
年份：
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
DPS II AE
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
109727
晶圆尺寸：
12"/300mm
年份：
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available