paradigmE PAD series products have benefits in high etch rate, low plasma damage and low cost of consumables, and are the only ICP PAD etchers in mass production.

Mattson Technology, Inc. designs, manufactures, markets and globally supports semiconductor wafer processing equipment used in the fabrication of integrated circuits. Supplier of plasma and rapid thermal processing (RTP) equipment to the global semiconductor industry, and operate in four primary product sectors: Dry Strip, Etch, Rapid Thermal Processing and Millisecond Anneal.

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paradigmE PAD

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