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市场 > Dry / Plasma Etch > KLA / SPTS > PRIMAXX uETCH

PRIMAXX uETCH

概述

SPTS's uEtch is a single-wafer system specifically designed for university and small research laboratories. Can process single whole wafers (100-200mm) or die on a carrier HF vapor processes are transferable to SPTS 3- and 25-wafer production systems, offering a path from concept to production

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