说明
Chemical Dry Etch (CDE)配置
无配置OEM 型号描述
Certas WING™ is the 2nd generation plasma-free gas chemical etch system from Tokyo Electron targeted at selective oxide film etching. Productivity of the new tool has been improved with twice the throughput while maintaining the same footprint. The Certas WING™ process capability has been expanded to achieve higher etch volumes and provide flexibility for etching of a wider variety of silicon based films that will be used in future semiconductor device manufacturing.文件
无文件
TEL / TOKYO ELECTRON
Certas WING
已验证
类别
Dry / Plasma Etch
上次验证： 15 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
113853
晶圆尺寸：
12"/300mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / TOKYO ELECTRON
Certas WING
类别
Dry / Plasma Etch
上次验证： 15 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
113853
晶圆尺寸：
12"/300mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Chemical Dry Etch (CDE)配置
无配置OEM 型号描述
Certas WING™ is the 2nd generation plasma-free gas chemical etch system from Tokyo Electron targeted at selective oxide film etching. Productivity of the new tool has been improved with twice the throughput while maintaining the same footprint. The Certas WING™ process capability has been expanded to achieve higher etch volumes and provide flexibility for etching of a wider variety of silicon based films that will be used in future semiconductor device manufacturing.文件
无文件