说明
无说明配置
Software Version V5.80c CIM E84, SECS/GEM, GEM300, Interface A Process ETC_GatePatterning Main System TACTRUS NCCP 1 OK Handler System Vacuum Transfer Module 1 OK Handler System Loader Module 1 OK Handler System Loadlock Module 1 OK Factory Interface FOUP 5 OK RF Generators 4 OK AC Power Rack 1 OK Pump Rack 1 OK Pumps 4 OK Chillers 4 OKOEM 型号描述
未提供文件
无文件
TEL / TOKYO ELECTRON
TACTRUS NCCP
已验证
类别
Dry / Plasma Etch
上次验证： 23 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
106074
晶圆尺寸：
12"/300mm
年份：
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / TOKYO ELECTRON
TACTRUS NCCP
类别
Dry / Plasma Etch
上次验证： 23 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
106074
晶圆尺寸：
12"/300mm
年份：
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Software Version V5.80c CIM E84, SECS/GEM, GEM300, Interface A Process ETC_GatePatterning Main System TACTRUS NCCP 1 OK Handler System Vacuum Transfer Module 1 OK Handler System Loader Module 1 OK Handler System Loadlock Module 1 OK Factory Interface FOUP 5 OK RF Generators 4 OK AC Power Rack 1 OK Pump Rack 1 OK Pumps 4 OK Chillers 4 OKOEM 型号描述
未提供文件
无文件