Dry etch
Process: oxide

Configuration: 3ch:Oxide
Not working tool: there are missing parts

Missing Parts: 

Part name

Potential Part Number	General Description

Floppy drive	Floppy drive

1D86-023244-14 	MO drive communication cable

1D86-023248-15 	MO drive power cable

1D80-001496-14	Front monitor

1D80-001496-14	Maintenance controller

1D10-314636-12	Force inlet cover

1810-329468-12 	Slit gate valve body

046-001311-1 	Signal tower

1D80-004078-11	ECC power supply

ECC rack boards	ECC rack boards

1D80-004121-12	TOP match

1D80-004982-1*	Matcher controller

1810-121864-11	ESC

1D80-005605-12	Process chamber manometer

1D80-004407-11	Back pressure controller (center)

1D80-004407-11	Back pressure controller (Edge)

036-005057-1	ATM Sensor

1D81-000486-11	Pressure controller(PB-6)

1D81-000486-11	Pressure controller(PB-6)

1D10-350848-11	Card rack acrylic cover

017-005557-1	TOP chiller hose

1D10-410483-11	TOP RF cable support (main unit)

020-001089-1	TOP RF cable support screw

1D80-004539-11 	Foreline valve for turbo pump exhaust

1810-430592-11	UV cut film for side endpoint windows

040-002527-1 	Unit BOX lower part FAN

1D81-000099-J5	MAIO board

1D81-000099-J5	MAIO board

1D80-003894-12	Combination gauge

1D80-004695-11	Filtering for combination gauge

027-003542-1	O-ring for combination gauge

1D80-004122-12	BOT match

1D80-005607-12	Manometer for self-check

1D81-000096-B4	GAS board (1)

012-008460-1 	Air operating valve in GAS BOX (G5)

1D80-003246-1*	MLT DC BOX200

1D80-003054-13	TOP RF generator

1D80-003143-12	BOT RF generator

1D81-000405-13	ILK board

1D81-00000921B	IO board

1D08-000098-13	DIO board

1D08-000096-15	GAS board

1D08-000096-15	GAS board

1D80-004816-14	VAT valve Assy

UPS	UPS

MO drive	MO drive

1D80-004876-11	Pre-alignment Hoist unit

INR-497(SMC)	Chiller



System Specification 1			



System Overview			

	General Information		

	Fab		

	Location		

	Technology	Oxide Etch	

	Platform Type	Me	

	Fab Tool ID	CWDE-TM-06	

	Software Revision	Ver 1.00	



	Wafer Specification		

	Wafer Size	200mm	

	Wafer Shape		

	SMIF Interface	NO	



	Chamber Type/Location		

	Process chamber 1	SCCM OXIDE LD TYPE	

	Process chamber 2	SCCM OXIDE LD TYPE	

	Process chamber 3	SCCM OXIDE LD TYPE	

	Cassette chamber 	Wide Type Slot 25 Slot pitch 1/4 inch Dummy wafer unloading 4 slots	

	Transport chamber	UNITY Me	

	System control box	ECC controller / TC controller	

	AC power distribution module	1 Rack	

	VAC / RF control module	2 Rack	



Specific Fab Options			

	Electrical Requirements	Installed Option	

	Line Voltage	3-phase 4-wire connection VAC200v / Control system single phaseVAC200v	

	Line Frequency	50/60 Hz	



	System Safety Equipment		

	EMO Switch Type	Press To Activate,Turn to Release EMO	

	EMO Guard Ring	Yes	

	System Labels	English Only Labels	





PC1 Oxide Etch	Metal Etch Chamber Options		

	Chamber Body	Aluminum alumite Temperature control range Room temperature ~ 60 ℃	

	Chamber Orings	Armor Crystal / Viton	

	Manometer Type	Leybold CR090 33.25Pa	

	Throttle Valve	VALVE ASSY THROTTLING GATE  65048-PH52-AFR1(VAT)	



	Upper Chamber Type	SCCM UEL Body	

	Baffle plate	8K	

	Top cooling plate	320-T15-215-D100	

	Upper electrode	320-T5*5-215-75(CEL)	

	Shield ring	T5-280	

	Gap drive Drive mechanism	AC servo motor	

	Upper and lower electrode setting range	15~60mm±0.1mm	

	ESC Type	Ceramic ESC (1 body type with groove), Electrostatic wafer clamp Clamping force 6650 Pa, Supply voltage 0 ~ 4kvDC (MAX)	

	Focus Ring	Si(Silicone rubber laying)	

	Lift Pin	Made by Vespel	

	Temperature control pipe diameter	3/4 inch	

	Back He controller(Center)	UPC-4WS-C13S(FUJIKIN) 0~13300 Pa	

	Back He controller(Edge)	UPC-4WS-C13S(FUJIKIN) 0~13300 Pa	

	Turbo Pump	SEIKO SEIKI STP-A2203W1-U	

	Turbo Pump Controller	SEIKO SEIKI  SCU-A2203W1-U	

	Bottom Match	DAIHEN WMN-30F	

	Top Match	DAIHEN AMN-30C10	









PC2 Oxide Etch	Metal Etch Chamber Options		

	Chamber Body	Aluminum alumite Temperature control range Room temperature ~ 60 ℃	

	Chamber Orings	Armor Crystal / Viton	

	Manometer Type	Leybold CR090 33.25Pa	

	Throttle Valve	VALVE ASSY THROTTLING GATE  65048-PH52-AFR1(VAT)	



	Upper Chamber Type	SCCM UEL Body	

	Baffle plate	8K	

	Top cooling plate	320-T15-215-D100	

	Upper electrode	320-T5*5-215-75(CEL)	

	Shield ring	T5-280	

	Gap drive Drive mechanism	AC servo motor	

	Upper and lower electrode setting range	15~60mm±0.1mm	

	ESC Type	Ceramic ESC (1 body type with groove), Electrostatic wafer clamp Clamping force 6650 Pa, Supply voltage 0 ~ 4kvDC (MAX)	

	Focus Ring	Si(Silicone rubber laying)	

	Lift Pin	Made by Vespel	

	Temperature control pipe diameter	3/4 inch	

	Back He controller(Center)	UPC-4WS-C13S(FUJIKIN) 0~13300 Pa	

	Back He controller(Edge)	UPC-4WS-C13S(FUJIKIN) 0~13300 Pa	

	Turbo Pump	SEIKO SEIKI STP-A2203W1-U	

	Turbo Pump Controller	SEIKO SEIKI  SCU-A2203W1-U	

	Bottom Match	DAIHEN WMN-30F	

	Top Match	DAIHEN AMN-30C10	





PC3 Oxide Etch	Metal Etch Chamber Options		

	Chamber Body	Aluminum alumite Temperature control range Room temperature ~ 60 ℃	

	Chamber Orings	Armor Crystal / Viton	

	Manometer Type	Leybold CR090 33.25Pa	

	Throttle Valve	VALVE ASSY THROTTLING GATE  65048-PH52-AFR1(VAT)	



	Upper Chamber Type	SCCM UEL Body	

	Baffle plate	8K	

	Top cooling plate	320-T15-215-D100	

	Upper electrode	320-T5*5-215-75(CEL)	

	Shield ring	T5-280	

	Gap drive Drive mechanism	AC servo motor	

	Upper and lower electrode setting range	15~60mm±0.1mm	

	ESC Type	Ceramic ESC (1 body type with groove), Electrostatic wafer clamp Clamping force 6650 Pa, Supply voltage 0 ~ 4kvDC (MAX)	

	Focus Ring	Si(Silicone rubber laying)	

	Lift Pin	Made by Vespel	

	Temperature control pipe diameter	3/4 inch	

	Back He controller(Center)	UPC-4WS-C13S(FUJIKIN) 0~13300 Pa	

	Back He controller(Edge)	UPC-4WS-C13S(FUJIKIN) 0~13300 Pa	

	Turbo Pump	SEIKO SEIKI STP-A2203W1-U	

	Turbo Pump Controller	SEIKO SEIKI  SCU-A2203W1-U	

	Bottom Match	DAIHEN WMN-30F	

	Top Match	DAIHEN AMN-30C10	







Gas Delivery Options	Gas Panel	Installed Option	

	Cabinet Exhaust	Φ150ｍｍ　-49Ｐａ	

	SLD Fitting Type	Accumulation type	

	Valve	Diaphragm valve MEGA-MINI(FUJIKIN)	

	Filter	TOSHIBA Ceramic CEP-TM-HL-VR-03PB	

	Regulator	VERIFLO SQ-MICRO-30-2P-UPG-6028(P-GAS),

VERIFLO SQ-MICRO-HF-50-2P-UPG-6010(N2)	

	MFC	Horiba Stec SEC-7330MC-UC-800A	

	Pressure switch	MKS 51A-13TCA2BA700	

	Pressure gauge	Nagano Keiki GW35-1Q4	



	Gas Pallet One	Installed Option	

	Gas Pallet PC1	Metal Etch	

	GAS1 BLIND	-	

	GAS2 Ar	1000 SCCM	

	GAS3 CF4	100 SCCM	

	GAS4 Ar	200 SCCM	

	GAS5 CHF3	100 SCCM	

	GAS6 C2F6	50 SCCM	

	GAS7 C4F6	50 SCCM	

	GAS8 O2	50 SCCM	

	GAS9 O2	500 SCCM	

	GAS10 C4F8	30 SCCM	

	GAS11 He	300 SCCM	

	GAS12 BLIND	-	





	Gas Pallet One	Installed Option	

	Gas Pallet PC2	Metal Etch	

	GAS1 BLIND	-	

	GAS2 Ar	1000 SCCM	

	GAS3 CF4	100 SCCM	

	GAS4 Ar	200 SCCM	

	GAS5 CHF3	100 SCCM	

	GAS6 C2F6	50 SCCM	

	GAS7 C4F6	50 SCCM	

	GAS8 O2	50 SCCM	

	GAS9 O2	500 SCCM	

	GAS10 C4F8	30 SCCM	

	GAS11 He	300 SCCM	

	GAS12 BLIND	-	





	Gas Pallet One	Installed Option	

	Gas Pallet PC3	Metal Etch	

	GAS1 BLIND	-	

	GAS2 Ar	1000 SCCM	

	GAS3 CF4	100 SCCM	

	GAS4 Ar	200 SCCM	

	GAS5 CHF3	100 SCCM	

	GAS6 C2F6	50 SCCM	

	GAS7 C4F6	50 SCCM	

	GAS8 O2	50 SCCM	

	GAS9 O2	500 SCCM	

	GAS10 C4F8	30 SCCM	

	GAS11 He	300 SCCM	

	GAS12 BLIND	-	







	Loadlock/Cassette		

	Loadlock Type	Wide Body Loadlock	

	Cassette Type Supported	Slot 25 Slot pitch 1/4 inch Dummy wafer unloading 4 slots	

	Wafer Out of Cassette Sensor	Yes	

	Cassette processing	Uni-cassette	

	Peep window	Side	

	Pressure switch	LEYBOLD PS113	



	Pre-alignment Unit		

	Wafer centering accuracy	±0.2mm	

	Wafer rotation direction accuracy	±1θ	



Mainframe Options			

	Transfer Chamber		

	Process Chamber1 Slit Valve	V-TEX ROLLCAM GateValve Armor Crystal 	

	Process Chamber2 Slit Valve	V-TEX ROLLCAM GateValve Armor Crystal 	

	Process Chamber3 Slit Valve	V-TEX ROLLCAM GateValve Armor Crystal 	





	Robot Blade	Aluminium 	

	Pressure sensor	Convectron gauge	

	On The Fly Centerfind	No	





	Status Light Tower	Yes	

	Signal Lamp Tower	Patrite	

	Tower Location	Upper right part of the operation surface of the main body	

	Lamp Colors	R-G-Y	







	Fab Interface		

	ONLINE	TEL standard Unity GEM	









	System Controller		

	Controller GFCI	30ma GFCI	

	Cntrlr Electrical Interface	Controller Top Feed AC Cables	

	Controller Exhaust	Top	

Phase II Facilities	Cursor Type	Blinking Cursor	



	Heat Exchanger/Chiller		

	Low Temp Top Temp	INR-497-005(Dual)	

	Brine(CH1:Top)	Galden HT-200 +30℃～+90℃	

	Brine(CH2:Low)	Galden HT-135 -20℃～+60℃	

	CFC	R-404A	

	Brine hose	SUS304 Maximum length: 20m,Maximum height: 7m	



Remote Options			



	Generator Rack Options		

	PC1 Bias RF Generator	DAIHEN WGA-30A(2MHz)	

	PC1 Top RF Generator	DAIHEN AGA-27A3(60MHz)	

	PC2 Bias RF Generator	DAIHEN WGA-30A(2MHz)	

	PC2 Top RF Generator	DAIHEN AGA-27A3(60MHz)	

	PC3 Bias RF Generator	DAIHEN WGA-30A(2MHz)	

	PC3 Top RF Generator	DAIHEN AGA-27A3(60MHz)	







	Pump Options		

	Pump Provider	EBARA	

	Pump Interface Type	EBARA	

	Transport Loadloc Chamber Pump	A10S	

	Process Chamber Pump PC1	A10S	

	Process Chamber Pump PC2	A10S	

	Process Chamber Pump PC3	A10S

TEL / TOKYO ELECTRON

TEL / TOKYO ELECTRON

UNITY ME 8555SSS

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