说明
无说明配置
- 4 Plating Chambers - 2 Preclean / SRD Chambers - Genmark Radial Robot - 1 Tank Ultrasonic Level Sensor - ARU Interface - Levitronix Pumps - Surpass Flow Meters - Pall 10” Filter Housings (Plating Cells) - Pall 4” Filter (Prewet Tank) - Sample Port - Fire Suppression System - Chemical Bulk Fill - Dynatronix Pro Series Plating Power Supply (4-Cell) - Tank Heat Exchange Connections - Power: 208VAC, 80A, 50/60HzOEM 型号描述
Equinox is a single wafer, multi-chamber process platform for cassette-to-cassette cleaning, etching, developing, and electroplating. It offers configurations from one to six chambers with a centralized controller and robotics. The platform is capable of performing various processes on substrates ranging from 3" to 200mm in size. It works by using a central dual end-effector robot to transfer substrates from cassette to chamber and back again. Equinox can help automate manual steps and transfers while increasing throughput with a small footprint. It offers ultra-clean dry-to-dry operation with uniform plating and etching results. The platform can integrate sequential process steps with a low cost of ownership (CoO) and provides a migration path from small R&D platforms to production systems with the same process chambers and control features.文件
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SEMITOOL
EQUINOX
已验证
类别
Wet processing
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
18604
晶圆尺寸：
6"/150mm
年份：
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SEMITOOL
EQUINOX
已验证
类别
Wet processing
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
18604
晶圆尺寸：
6"/150mm
年份：
2005
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
- 4 Plating Chambers - 2 Preclean / SRD Chambers - Genmark Radial Robot - 1 Tank Ultrasonic Level Sensor - ARU Interface - Levitronix Pumps - Surpass Flow Meters - Pall 10” Filter Housings (Plating Cells) - Pall 4” Filter (Prewet Tank) - Sample Port - Fire Suppression System - Chemical Bulk Fill - Dynatronix Pro Series Plating Power Supply (4-Cell) - Tank Heat Exchange Connections - Power: 208VAC, 80A, 50/60HzOEM 型号描述
Equinox is a single wafer, multi-chamber process platform for cassette-to-cassette cleaning, etching, developing, and electroplating. It offers configurations from one to six chambers with a centralized controller and robotics. The platform is capable of performing various processes on substrates ranging from 3" to 200mm in size. It works by using a central dual end-effector robot to transfer substrates from cassette to chamber and back again. Equinox can help automate manual steps and transfers while increasing throughput with a small footprint. It offers ultra-clean dry-to-dry operation with uniform plating and etching results. The platform can integrate sequential process steps with a low cost of ownership (CoO) and provides a migration path from small R&D platforms to production systems with the same process chambers and control features.文件
无文件