说明
MISSING PARTS Contacts Rings and lip seals (Consumable) Anodes (Consumable)配置
Model: Raider 210 ECD Type: Electroplating Model Number: R310PD2(1SA2CFD1CAP)08(CuNi)03 SYSTEM GENERAL CONFIGURATION 3 X Cassette WIP 1 X Capsule (Backside Clean & Backside Bevel Etch), 2 X ECD (CFD3), 1 X SRD 1 X Linear Dual Arm Robot with Single Vacuum End effector 1 X ARU (Advanced Replenishment Unit) 2 X CDU (Chemical Delivery Unit) 2 x Heat Exchanger 1 x DI Boost Pump Unit Fire Suppression System with three CO2 bottles MAIN POWER 208 VAC, 3Phase, 4 Wires, 50/60 Hz COMPUTER & CONTROL 1 x WIP Computer, 1 X Module Computer, 1 X Robot Computer 1 X FUI (Front User Interface), 1X RUI (Rear User Interface) 502 Controller with WINDOWS EMBEDDED OS Tool Software Version is unknownOEM 型号描述
The Raider™ ECD is a fourth-generation single wafer electrochemical deposition tool that delivers advanced metal processing in a small footprint. It is an automated, multi-process tool that is available with cluster modules for metrology, plating, and cleaning. The Raider™ incorporates programmable reactors and can provide an ECD seed layer, a full solution for copper fill with uniformity and film characteristics, and integrated removal of all backside, bevel, and edge copper contamination and seed layer edge exclusion etch. Additionally, in-situ anneal is available. This tool is designed to provide advanced metal processing capabilities in a compact and efficient package.文件
APPLIED MATERIALS (AMAT) / SEMITOOL
RAIDER ECD
已验证
类别
Electro Plating
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
24213
晶圆尺寸:
8"/200mm
年份:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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查看全部APPLIED MATERIALS (AMAT) / SEMITOOL
RAIDER ECD
已验证
类别
Electro Plating
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
24213
晶圆尺寸:
8"/200mm
年份:
2004
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available