概述

The JIMA (Japan Inspection Instruments Manufacturers' Association) resolution test chart JIMA RT RC-02B is a micro chart fabricated by using the latest semiconductor lithography techniques. It is used for calibration and monitoring of system resolution and ensures high quality results of your microfocus or nano-resolution X-ray system. JIMA RT RC-02B supports resolutions between 0.4 microns and 15 microns. This corresponds to focal spot sizes between 0.8 microns and 30 microns.