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RT RC-02B
概述
The JIMA (Japan Inspection Instruments Manufacturers' Association) resolution test chart JIMA RT RC-02B is a micro chart fabricated by using the latest semiconductor lithography techniques. It is used for calibration and monitoring of system resolution and ensures high quality results of your microfocus or nano-resolution X-ray system. JIMA RT RC-02B supports resolutions between 0.4 microns and 15 microns. This corresponds to focal spot sizes between 0.8 microns and 30 microns.
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