CENTURA 5200 TPCC
概述
The Centura is Applied’s most versatile platform. Launched in 1992, over 8,000 Centura systems have been shipped to customers around the world. For ≤200mm fabrication the applications supported include CVD, epitaxy, etch, plasma nitridation and RTP
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APPLIED MATERIALS (AMAT)
CENTURA 5200 TPCC
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