PE106A
概述
Silicon carbide (SiC) tools use an epitaxy process to deposit the SiC materials on either bare wafers or as part of the transistor device fabrication process. Epitaxial reactors for SiC and silicon.
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Silicon carbide (SiC) tools use an epitaxy process to deposit the SiC materials on either bare wafers or as part of the transistor device fabrication process. Epitaxial reactors for SiC and silicon.
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