说明
Wafer Edge Cleaning - Plasma配置
无配置OEM 型号描述
The 2300 Coronus is a plasma-based bevel clean system developed by Lam Research. It removes yield-limiting defect sources from the wafer edge, maximizing yield. The system combines plasma cleaning with proprietary confinement technology to protect the die area. It is flexible and robust, allowing for removal of different materials within the same chamber for a wide range of wafer cleaning applications. The Coronus system incorporates Lam Research’s Dynamic Alignment technology for highly accurate wafer placement and encroachment control.文件
无文件
LAM RESEARCH CORPORATION
2300 CORONUS
已验证
类别
Etch/Asher
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
91741
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
2300 CORONUS
类别
Etch/Asher
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
91741
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Wafer Edge Cleaning - Plasma配置
无配置OEM 型号描述
The 2300 Coronus is a plasma-based bevel clean system developed by Lam Research. It removes yield-limiting defect sources from the wafer edge, maximizing yield. The system combines plasma cleaning with proprietary confinement technology to protect the die area. It is flexible and robust, allowing for removal of different materials within the same chamber for a wide range of wafer cleaning applications. The Coronus system incorporates Lam Research’s Dynamic Alignment technology for highly accurate wafer placement and encroachment control.文件
无文件
类似上架物品
查看全部无类似上架物品