Plasma System 
Plasma Cleaning for wafers. 

Processing of 3D and wafer-level packaging processes such as fan-in, fan-out, wafer-level, and panel-level - handling wafers up to 450mm and panels up to 480mm. 

Nordson MARCH was formed through the merging of March Instruments of Concord, California, USA and Advanced Plasma Systems (APS) of St. Petersburg, Florida, USA. The company was acquired in 1999 by Nordson Corporation and referred to as March Plasma Systems until renamed Nordson MARCH in 2009.

https://www.nordson.com/en/divisions/march

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