说明
无说明配置
Two process modules: 1) XeF2 etching chamber with end point detection 2) CVD deposition chamber used for oxide, silicon, and nitrideOEM 型号描述
Versalis fxP - a cluster system supporting a mixture of etch and deposition process chambers (up to 6 modules in total), useful for R&D or pilot production, saving both capital expenditure and cleanroom footprint. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.文件
无文件
KLA / SPTS
VERSALIS fxP
已验证
类别
Etch/Asher
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
75494
晶圆尺寸：
8"/200mm
年份：
2018
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
VERSALIS fxP
类别
Etch/Asher
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
75494
晶圆尺寸：
8"/200mm
年份：
2018
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Two process modules: 1) XeF2 etching chamber with end point detection 2) CVD deposition chamber used for oxide, silicon, and nitrideOEM 型号描述
Versalis fxP - a cluster system supporting a mixture of etch and deposition process chambers (up to 6 modules in total), useful for R&D or pilot production, saving both capital expenditure and cleanroom footprint. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.文件
无文件