The Monarch 3 is a compact module includes a 3-wafer process chamber, and is designed for research laboratory and small volume production environments.
Third generation process chamber has been designed for easy wafer size changes and maintenance
Wafer loading options include a semi-automatic 3-wafer loader with load lock, and various cluster-based configurations

Previously under Orbotech that KLA acquired in 2019.

SPTS Technologies provides advanced wafer processing solutions to the world's leading semiconductor and microelectronic device manufacturers. We make electronics possible.

PRIMAXX MONARCH 3

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