概述

The A4ALD is an Advance® 400 Series reactor module specifically designed for ALCVD, ASM’s atomic layer deposition technology. The A4ALD merges the technological expertise of ASM’s Pulsar®, its single-wafer platform for ALCVD, and the Advance 400 Series vertical furnaces to create a cost-effective batch solution targeted mainly for dielectric capacitor market. Situating ALCVD in a vertical batch furnace allows for a higher throughput, as up to 100 wafers can be processed simultaneously. This is particularly beneficial for thicker layer films, such as the ones used for MIM capacitors.