C30VR
概述
The C30VR unit is necessary to operate the cryopump. Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
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2
服务
检验、保险、评估、物流
The C30VR unit is necessary to operate the cryopump. Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
2
检验、保险、评估、物流